N2 Gas Piping - EBARA ESA300W Instruction Manual

When several pumps are used, be sure to connect the cooling water pipes to each
CAUTION
pump in parallel. The cooling water will flow more or less easily according to the
type of pump and the piping. Be sure to select the correct piping so as to ensure
the appropriate cooling water flow rate for all pipes used.
When the cooling water connections are incorrect and the flow is reversed, a flow
CAUTION
rate different from the normal value will be displayed. Nor will the pump will not be
cooled properly. This will result in accident.
Be sure therefore to connect correctly to avoid problems.
When the cooling water supply is left on while the pump is stationary dew
CAUTION
condensation will form on the water-cooled parts in locations with high humidity.
Make it a rule therefore to stop the cooling water when water droplets can be
detected on the outer surface of the pump cooling water piping as this suggests the
possibility of dew condensation in the pump.

4.2.3 N2 Gas Piping

Cut tube at right angles and make the end-face perfectly smooth. Then connect
the tube to the tube fitting assembly of the N2 gas purge port. The tube is a push-fit
onto the shoulder of the tube fitting assembly.
Secure the tube fitting assembly properly and tighten the retaining nut by hand.
After this, use a tool to tighten the nut further by 1 + 1/4 turns.
To connect the tube again after this, install the tube already fitted to the ferrule and
re-tighten the retaining nut slightly after the initial tightening (generally, tighten by
a further quarter turn after tightening by hand).
Front
Body
Ferrule
For safety, be sure to use N2 gas which purity is more than 99.999%.
CAUTION
Impurities of N2 gas may cause an accident when the pump is used for exhausting
toxic and/or inflamable gases.
Back
Nut
Ferrule
Figure 4.3 Tube Fitting Assembly
(26)
1 + 1/4
Rotation
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CORPORATION