EBARA ESA200W Instruction Manual page 51

P.32
BP: ##.# A
MP: ##.# A
▽ △
CONTROL：LOCAL
MODE：NORMAL
▽ △
PUMP RUNNING
HISTORY？
△
▽
ALARM/WARNING
HISTORY？
▽ △
UNIT NO
&&&&&&&&
▽ △
PUMP TYPE ### V
ESA###
▽ △
OPE．TIME
#### h
▽ △
HT 1:### 2:###
°C 3:### 4:###
▽ △
BACK PRESSURE
##．# kPa
▽ △
PUMP N2 FLOW
##．# Pam3/s
▽ △
WATER FLOW
##．# L/min
▽ △
CASING TEMP．
### °C
▽ △
BP SPEED
# ．# k min-1
PM10U
Current
Control mode: LOCAL, REMOTE, COM
Pump operational mode: NORMAL(rated), S. ENERGY (energy-saving)
PRG.
MP START/STOP
ENTER
HISTORY
Running history
▽
(Indication of history)
BP START/STOP
HISTORY
PRG.
ALARM：CASING
ENTER
TEMP．HIGH
Alarm history
▽ △
(Indication of history)
Pump unit No.
WARNING：BP MOTOR
TEMP．HIGH
PUMP Type
Voltage
Total operation time
Heater temperature (option)
Back pressure (option)
Pump N2 gas flow
Cooling water flow
Pump casing temperature
Motor speed
Fig. 6.2 Key operation for the pump operation status
PRG.
ENTER
△
PRG.
ENTER
ENTER
Displayed during ENTRY key pushed
ENTER
Displayed during ENTRY key pushed
How to read the alarm history
Alarm 1st code
History No.
(The lower number. is newer.)
002 51
020901 12 : 25 : 26
Occurrence date
See Table 6.2 for the alarm codes.
display screen
001MP START
070101 12:00:00
001BP STOP
070101 12:00:00
001 06 00 ####
020901 12：23：21
002 51 00 ####
020901 12：25：26
Alarm 2nd code
Analog value
00 ####
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CORPORATION