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P.4
3.1.3 Cooling Water
Because the pump compresses gas from a vacuum to atmospheric pressure,
compression heat is generated. Therefore cool the motor with cooling water.
The cooling water connector takes the form of a coupler for easy connection and
disconnection.
3.1.4 Exhaust
A check valve is provided as a standard accessory to prevent reverse flow of
gas from the exhaust through the pump to the vacuum chamber when pump is
stopped.
3.2 Control System
This pump has a built-in measuring unit consisting of a Circuit Breaker (CB), an
electro-magnetic switch and a control circuit.
To improve reliability and safety, the condition of each utility and pump section is
monitored by a sensor.
During pump operation all operating conditions are monitored, including power
supply, cooling water flow, N2 gas flow, casing and motor coil temperature,
motor speed, and electric power for motor.
Continuous operation is possible when there is a momentarily power failure of
1 sec or less.
3.2.1 Warning
To assure the reliability of the pump as a vacuum exhaust system, the pump
protection system generates two levels of alarm： WARNING and ALARM.
A WARNING signal is generated when pump operation exceeds the normal
range. It therefore only draws attention that the normal operating values are not
adhered to but does not signify that danger is imminent. The pump will continue
to operate in this condition.
An ALARM signal output is generated and the pump will stop automatically when
the upper mechanical safety limit is reached during pump operation.
When an ALARM output is suddenly generated, while the plant unit is
operational, a WARNING signal will be generated to ensure that the plant
operation is not discontinued. This enables the operator to check the pump after
the equivalent of one cycle has been completed.
Be sure to contact EBARA Corporation for details on checking the WARNING
and ALARM setting conditions.
EBARA
CORPORATION
PM10U
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Troubleshooting
