EBARA ESA200W Instruction Manual page 42

Pin. No.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
PM10U
8
15 9
15 Pin D Sub-Miniature Female Receptacle
(As seen from connecting side)
Table 4.5 Control Connector Pin Assignment(CN-Z)
Signal name
MP START (+)
BP START (+)
MP START STATUS (+)
BP START STATUS (+)
WARNING STATUS (+)
ALARM STATUS (+)
REMOTE STATUS (+)
−
MP START (−)
BP START (−)
MP START STATUS (−)
BP START STATUS (−)
WARNING STATUS (−)
ALARM STATUS (−)
REMOTE STATUS (−)
Screw lock size : M2.6
1
Contact pin surface : Au
Fig. 4.5
I/O Signal type
IN Run ： CLOSE, Alternate
IN
Run ： CLOSE, Alternate
OUT Run ： CLOSE, Alternate
OUT Run ： CLOSE, Alternate
OUT
WARNING ： OPEN, Alternate
OUT ALARM ： OPEN, Alternate
OUT REMOTE ： CLOSE
P.23
EBARA
CORPORATION