Setting The Pump N2 Flow Low Warning Threshold; Setting The Dilution N2 0Mode Warning Threshold (Option) - EBARA ESA200W Instruction Manual

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6.3.6 Setting the pump N2 flow low warning threshold

SET POINT
PUMP N2 WARNING?
△ ▽
△
▽
Upper limit 81.0 Pam
Lower limit 2.0 Pam

6.3.7 Setting the dilution N2 0mode warning threshold (option)

SET POINT
PUMP N2 WARNING?
△ ▽
△
▽
Upper limit 81.0 Pam
Lower limit 7.4 Pam
PM10U
ＰＲＧ．
SET POINT
PUMP N2 FLOW LOW?
△
▽
SET POINT
PUMP N2 FLOW DLY?
ＰＲＧ．
Use the up and down arrow keys to change the setting value.
： Increase the setting speed by 0.1 Pam
： Decrease the setting speed by 0.1 Pam
3
/s (Delay time：60 sec)
3
/s (Delay time：5 sec)
ＰＲＧ．
SET POINT
N2 0MODE?
△
▽
SET POINT
N2 0MODE DLY?
ＰＲＧ．
Use the up and down arrow keys to change the setting value.
： Increase the setting speed by 0.1 Pam
： Decrease the setting speed by 0.1 Pam
3
/s (Delay time：60 sec)
3
/s (Delay time：5 sec)
ＰＲＧ．
N2 FLOW LOW
ENTER
#．# Pam3/s
Use the keys, "△" and "▽" to set.
N2 FLOW LOW DLY
ENTER
## sec
Use the keys, "△" and "▽" to set.
ＰＲＧ．
3
/s (Delay time：1 sec)
3
/s (Delay time：1 sec)
ＰＲＧ．
N2 0MODE
ENTER
#．# Pam3/s
Use the keys, "△" and "▽" to set.
N2 0MODE DLY
ENTER
## sec
Use the keys, "△" and "▽" to set.
ＰＲＧ．
3
/s (Delay time：1 sec)
3
/s (Delay time：1 sec)
Setting
ENTER
done
Setting
ENTER
done
Setting
ENTER
done
Setting
ENTER
done
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