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P.48
Operate the N2 gas selector valve in accordance with the dilution N2 mode
set by DIP switch-A No. 7.
If DIP Switch is set to OFF
If DIP Switch is set to ON
[ NOTE ] For normal operation, open the N2 gas selector valve. To save N2
gas set close the valve when the production process does not lead to
the formation of reaction by-products in the pump or when the
process uses non-corrosive gases.
[ NOTE ] The N2 gas selector valve is positioned on the front panel at the right
when viewing facing the pump front panel (operating panel).
[ NOTE ] It takes 10 odd seconds until the flow has stabilized after you have
operated the N2 gas selector valve.
(3) Turn on the power supply to the pump.
(4) The LCD controller counts down 10 seconds after placing the Circuit
Breaker (CB) into the ON position.
[ NOTE ] The pump cannot start while the measuring instruments are warming
up for 10 seconds after the CB is placed in the ON position.
(5) Check on the WATER FLOW display of the LCD Controller that the cooling
water flow rate is 3.5 L/min. or more.
(6) Re-check on the PUMP N2 FLOW display of the LCD Controller that the
dilution N2 gas flow rate is within the 17 - 20Pam
the pressure gauge shows a reading of 0.09 - 0.12MPa.
After setting the pressure, press the red stopper to lock the knob in position.
In this condition, the shaft sealing N2 flow rate is 4.6 - 6Pam
(The shaft sealing N2 flow rate is contained in pump N2 flow rate currently
displayed on the LCD controller.)
PM10U
Open Valve.
Close Valve.
3
/s range. Also check that
3
/s.
EBARA
CORPORATION
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Troubleshooting
