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Setting The Back Pressure High Warning Threshold (Option); Pump Valve Control (Option) - EBARA ESA200W Instruction Manual

Multi-stage dry vacuum pump

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P.40

6.3.10 Setting the Back Pressure high warning threshold (option)

SET POINT
BACK PRESSURE?
△ ▽
: Increase the setting value by 0.5 kPa.
: Decrease the setting value by 0.5 kPa.
Upper limit : 20.0 kPa
Lower limit : 5.0 kPa
Factory setting : 20.0 kPa
WARNING reset value : Set value –2.0 kPa

6.3.11 Pump Valve control (option)

1. Pump Valve control
・A valve follows operation from a LCD controller.
・An additional indication of the valve control screen is given at Customer operation mode.
SET
VALVE CONTROL?
SET
A.
VALVE OPEN?
SET
VALVE CLOSE?
B.In the case of under pump operation,
Valve operation is possible.
In the case of under pump stop,
Valve operation is impossible.
C.If it is made to decide by the ENTER key, a valve will open/close.
2.Valve operation
・Valve is made to CLOSE compulsorily at the time of a pump stop and Alarm
generating.
・A valve is made to CLOSE at the time of a power supply injection.
(The last valve state is not memorized.)
3.Display on LCD
・In the case of under pump operation, and in the case of Valve CLOSE,
INLET VALVE
CLOSED
PM10U
PRG.
ENTER
Use the up and down arrow keys to change the setting value.
PRG.
SET
ENTER
VALVE OPEN?
is displayed when the present valve state is CLOSE.
is displayed when the present valve state is OPEN
SET
It returns to
VALVE CONTROL?
is displayed on a Normal display mode.
BACK PRESSURE
##.#kPa
Use the keys, " △ " and " ▽ " to set.
PRG.
ARE YOU SURE?
ENTER
CAN'T
EXECUTE
PRG.
is displayed.
ARE YOU SURE?
CAN'T
is displayed.
EXECUTE!
screen.
SETTING
ENTER
DONE
ENTER
EBARA
CORPORATION

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