xvi
(
)
4.1.1 Location.......................................................................................12
4.1.3 Pump Fixation .............................................................................13
4.2 Piping .................................................................................................. 15
4.2.3 N2 Gas Piping ............................................................................. 17
4.3 Electrical Wiring................................................................................. 20
4.3.1 Grounding ................................................................................... 20
6. LCD Controller.......................................................................................... 29
6.1 LCD Outline ........................................................................................ 29
6.2 LCD Indication.................................................................................... 30
6.4 Dip Switch........................................................................................... 41
7. Operation .................................................................................................. 47
7.1 Before Starting ................................................................................... 47
7.2 START/STOP ...................................................................................... 50
PM10U
EBARA
CORPORATION