Utility Disconnection; Electrical Power - Circuit Breaker Lockout And Tagout - EBARA ESA200W Instruction Manual

Multi-stage dry vacuum pump

P.6

If pump should lose its balance when moving and start tripping over, never try to

sustain the pump, get away from the pump immediately.

3.4

Utility Disconnection

WARNING

WARNING To comply with SEMI S2, install lockable shutoff devices on electrical,

Lock the breaker in the OFF position and tag it out to perform maintenance or

troubleshooting.

1. Verify that the LCD display is lit (confirming that pump is powered).

2. Turn the handle of circuit breaker off and fix the lock lever of locking device.

3. Insert padlock through holes provided on locking device. Close padlock and

attach tag.

4. Keep the key with you while working. Prepare the tagout label per factory

procedures.

5. Verify that LCD display is unlit (confirming that pump is un powered).

6. If unable to confirm interruption of power via LCD display, use a voltmeter to

probe contacts at Connector CN-C. Potential between any two pins indicates

that electrical power to the pump is not interrupted.

7. The Lockout/Tagout procedures must comply with OSHA 29 CFR 1910.147 and

1910.331-335

PM10U

To avoid dangers potentially encountered during maintenance,

transportation or storage, follow instructions below to shut off

power.

Capacitors within the control panel retain residual energy after

interruption of power supply. Wait five (5) minutes after shutting

off breaker before opening the control panel. Carefully check that

bleed circuits have discharged the residual energy before servicing

the control panel.

nitrogen and cooling water supplies. These devices should be

adjacent to and within sight of the pump.

Steel Plate

EBARA

CORPORATION

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