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EBARA ESA200W Instruction Manual page 65

Multi-stage dry vacuum pump

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P.46
6.6 Starting/stopping the pump with the LCD controller
Maximum two LCD controllers can be connected. Note only one of them
can start and stop the pump (the other shows the pump operational statuses).
The controller of which LED "LOCAL" is lit on has precedence over the other
to control the start and stop operation.
If only one controller is connected, the controller starts and stops the pump.
START/STOP
When you use two controllers, disconnect the one which you will not use for
the operation from the pump once. Then, attach it again.
PM10U
One controller
Two controller connected
connected
The one with its LED
Allowed
"LOCAL" lit on is allowed.
EBARA
CORPORATION

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