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EBARA ESA200W Instruction Manual page 78

Multi-stage dry vacuum pump

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(2) After you have waited until the internal pump pressure returns to atmospheric
(normal) pressure, remove the plug from the oil-filler inlet. (See Fig. 8.2)
(3) Check the level through the window of the gauge. Then, add the oil so that
the level is upper limit line (see Fig. 8.2 and 8.3).
In case of a booster pump gear side, oil should be filled to the upper limit line
at the time of rated speed (5000kmin-1) operation.
( Target level is 2mm upper than the upper limit line at stop mode. )
(4) After you have checked that there are no depositions and fragments adhering
to the O ring attached to the plug, close the oil-filler inlet.
Oil level gauge
Oil level gauge
Fig. 8.2 Oil filler inlet, oil level gauge, and oil drain port positions
PM10U
Oil filler inlet
Oil level gauge
Oil drain
port
Oil drain
port
Oil drain
port
Oil drain port
Oil drain port
(Oil reservoir)
(Oil reservoir)
Oil drain port
Oil drain port
(Oil reservoir)
(Oil reservoir)
P.59
Oil filler inlet
Oil level gauge
(BP gear side)
Oil filler inlet
Oil level gauge
Oil drain port
Oil drain port
Oil drain port
EBARA
CORPORATION

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