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P.8
3.5 Detailed Specifications
The following tables and figures should be consulted for pump specification,
dimension and performance details.
Pumping Speed
Ultimate Pressure
Connection
Approx. Power at Ultimate Pressure
(Motor Power)
Cooling
Water
Uti-li
ty
N2
Gas
Duct
Venti-
*
Lation
Lubrication
Oil
Approx. Weight
Power
Supply
Control Signal
Circuit Breaker
Short Circuit Current Rating (SCCR)
Airborne noise test data [dB (A)] **
[Note] *
The ambient temperature of the pump installation place shall be 30
degrees of centigrade of lower.
** Test condition
(1) Pump is operating under ultimate pressure.
(2) Measured at 1m distance from cover and 1.6m height from floor.
PM10U
Table 3.1 Specification
Model
Gas Inlet
Gas Outlet
Connection
Pressure
[Gauge Press.]
Flow rate
Temperature
Connection
Pressure
[Gauge Press.]
Approx. Flow rate
[N2-0 Mode]
Connection
Pressure
Approx. Flow rate
Brand
Quantity
Phase/Volt/Freq.
Power capacity
Connection
Model ESA200W
20000 L/min
0.53 Pa
NW80
NW40
3.2kW ; 50Hz / 3.4kW ; 60Hz
(3.7kW(2P) + 4.0kW)
Coupler(Rc3/8)
Supply: Max. 0.4MPa
Differential Press. : Min. 0.1MPa
3.5 - 8 L/min
10 - 30 deg C
1/4" Tube Fitting(Same as Swagelok)
Supply : 0.15 - 0.7MPa
[Setting : 0.09 - 0.12MPa]
3
17 - 20 Pa m
3
[3.8 Pa m
/s]
d 50 mm x L 50 mm
-196 Pa
3
0.5 m
/min
BARRIERTA J100ES (NOK)
0.6 L
410 kg
3 Phase , 200-220V at 50 / 60Hz
12.0 kVA (50 / 60Hz)
Japan Aviation Electronics Industry
JL04HV-2E22-22PE-B
D-sub 15 Pin + D-sub 25 Pin
50A
2.5k A
64
EBARA
/s
CORPORATION
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Troubleshooting
