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The pump does not provide protective hardware, like gas leak detector. So it is
recommended to attach gas leak detector on detector port of duct piping to take
exhaust flow interlock. Leak detector shall be NRTL approved or equivalent.
In case of find gas leakage, stop the gas introduced into the equipment and
pump. It is strongly recommended to wire the control circuit such that the pump
immediately stops its operation upon leak detection by connecting the leak
detector output to the EMO external signal input of the pump. Refer to Section
4.3.4 in this manual for connecting the leak detector output.
CAUTION For safety, be sure to ventilate through the ventilation duct
CAUTION Even when the pump is used for exhausting process gases
CAUTION Never operate the pump without pump cover for safety.
PM10U
when the pump is used to exhaust toxic, inflammable, and/or
other hazardous gases. Do not combine the ventilation duct
with the pump exhaust piping
that are not toxic and/or inflammable, do not combine the
ventilation duct with the pump exhaust piping. The exhaust
noise of the pump will give rise to acoustic resonance inside
the pump unit and result in an abnormal noise being
generated.
P.19
EBARA
CORPORATION
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Troubleshooting
