N 2 Gas Piping - EBARA EV-S20 Instruction Manual

CAUTION Even when the cooling water flow rate drops, the pump will
CAUTION When several pumps are used, be sure to connect the cooling
CAUTION When the cooling water connections are incorrect and the flow
CAUTION When the cooling water supply is left on while the pump is
4.2.3 N Gas Piping
2
Cut tube at right angles and make the end-face perfectly smooth. Then connect
the tube to the tube fitting assembly of the N
push-fit onto the shoulder of the tube fitting assembly.
Secure the tube fitting assembly properly and tighten the retaining nut by hand.
After this, use a tool to tighten the nut further by 1 + 1/4 turns.
To connect the tube again after this, install the tube already fitted to the ferrule
and re-tighten the retaining nut slightly after the initial tightening (generally,
tighten by a further quarter turn after tightening by hand).
PM10U
continue to operate until the pump part reach a temperature
corresponding to the safety limit.
The material selected for the water piping of facility side should
have a heat resistance so that it can withstand a maximum
temperature of at least 70℃ at the operating pressure.
water pipes to each pump in parallel. The cooling water will flow
more or less easily according to the type of pump and the
piping. Be sure to select the correct piping so as to ensure the
appropriate cooling water flow rate for all pipes used.
is reversed, a flow rate different from the normal value will be
displayed. Nor will the pump will not be cooled properly.
This will result in accident.
Be sure therefore to connect correctly to avoid problems.
stationary dew condensation will form on the water-cooled
parts in locations with high humidity.
Make it a rule therefore to stop the cooling water when water
droplets can be detected on the outer surface of the pump
cooling water piping as this suggests the possibility of dew
condensation in the pump.
gas purge port. The tube is a
2
EBARA
P.43
CORPORATION