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P.3
3. Product Description
3.1 Outline
This pump has a compact design and includes various sensors and controls to
enhance reliability and operation.
3.1.1 Pump Module
The pump is a Roots type vacuum pump which rotates a pair of non-contact
multi-stage rotors synchronized by timing gears. In the unit, a Booster Pump
(BP) and the Main Pump (MP) are connected in series for ventilation.
The timing gears and bearings are enclosed in a compartment that is
independent of the casing. For lubrication Perfluoro-Polyether (PFPE) oil and
grease are used.
The pump is filled with lubricating oil at the factory. Use only the recommended
lubrication oil grades shown in specification Table 3.1 for replenishing or
replacing.
3.1.2 N2 Gas
Introduce nitrogen gas to dilute the hazardous gases to an unharmful level.
Properly connect the nitrogen gas line to the purge port provided according to
the instructions in Table 3.1 and the descriptions in Section 4.2.3. In the cases
the gas concentration may become higher than the specified for safe gas
exhaust, introduce the nitrogen gas to lines to the exhaust outlet. The tool user
shall provide the purge port for this purpose.
N2 gas is also required to supply to seal the shaft section. This protects the
penetration to bearing section, such as corrosive gas.
To reduce pump corrosion due to process gas or accumulation of reaction
by-products, N2 gas is supplied to each pump component as dilution purge gas.
Stopping the dilution N2 with a selector valve can save N2 gas, when process
does not produce corrosion and reaction by-products.
The correct amount of N2 gas is supplied for those two types of purge operation,
by adjusting the regulation pressure to the specified value.
The nitrogen gas selector is locating on the right side of the unit, facing the LCD
controller and other utility connectors. It is under the outer cover.
EBARA
CORPORATION
PM10U
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Troubleshooting
