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Abnormal symptom
Circuit breaker is activated.
(Leakage detector is on.)
Power LED does not come
on.
Nothing appears on LCD
MP does not start when
applying START button.
MP does not start when
entering external "MP start"
signal input.
BP does not start.
Abnormal noise
Excessive vibration
Vacuum pressure increase.
**MEMORY ERROR** is
displayed on LCD after
activating ELB or changing
the dip switch setting
PM10U
Check Item
Incorrect wiring
Short circuit
No power supply to pump.
connector is not connected.
CB is not ON.
CB is not ON.
Disconnection of the LCD's connector
Instrument failure
"Remote" mode has been selected.
Start-up conditions are not satisfied.
("Startfail" is displayed.)
Instrument failure
"Local" mode has been selected.
Start-up conditions are not satisfied.
("Startfail" is displayed.)
Instrument failure
BP start signal is not entered in
REMOTE mode.
Instrument failure
Adjustment feet are not applied.
Some object is making contact with the
outer cover.
The fastening screws of the outer corer
have worked themselves loose.
Parts of the pump are damaged.
Accumulation of by-products in pipes.
N2 pressure setting is high.
Leak from vacuum piping.
Accumulation of by-products in pumps.
None
Corrective Action
Check wiring.
Replace or overhaul pump.
Check power supply.
Connect power connector.
Place CB to ON.
Place CB to ON.
Connect LCD's connector
Replace instruments.
Set switch to "Local" mode.
Satisfy all start-up conditions.
Replace instrument.
Set switch to "Remote".
Satisfy all start-up conditions.
Replace instrument.
Enter the start signal.
Replace instruments.
Use the adjustment feet.
Remove the object.
Tighten the fastening screws.
Replace or overhaul pump.
Clean piping.
Set pressure for correct value.
Check piping.
Replace or overhaul pump.
Need "Countermeasure against
electric Noise" to pump.
EBARA
CORPORATION
P.67
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Troubleshooting
