Table Of Contents - EBARA ESA200W Instruction Manual

Environmental Basic Policies........................................................................... i
Safety Information ............................................................................................ ii
Important Prior Warnings................................................................................ iii
Safety Interlocks .............................................................................................. xi
Standard Limited Warranty ........................................................................... xiii
Declaration of Conformity............................................................................. xiv
Contents .......................................................................................................... xv
1. Foreword..................................................................................................... 1
2. Introduction ................................................................................................ 1
2.1 Introduction .......................................................................................... 1
2.2 Environmental Concerns..................................................................... 2
3. Product Description ................................................................................... 3
3.1 Outline................................................................................................... 3
3.1.1 Pump Module ................................................................................3
3.1.2 N2 Gas ...........................................................................................3
3.1.3 Cooling Water ...............................................................................4
3.1.4 Exhaust..........................................................................................4
3.2 Control System .................................................................................... 4
3.2.1 Warning .........................................................................................4
3.2.2 Operation Status Control ............................................................. 5
3.3 The way of pump moving .................................................................... 5
3.3.1 Preparation....................................................................................5
3.3.2 Moving method .............................................................................5
3.4 Utility Disconnection............................................................................ 6
3.4.1 Electrical Power - Circuit Breaker Lockout and Tagout ............ 6
3.4.2 Cooling water ................................................................................7
3.4.3 Nitrogen (N
3.4.4 Returning to Service .....................................................................7
3.5 Detailed Specifications........................................................................ 8
Specification .............................................................................................8
Outline Drawing........................................................................................9
Performance Curve ................................................................................ 10
System Flow ........................................................................................... 11
4. Installation ................................................................................................ 12
4.1 Movement and Fixation ..................................................................... 12
PM10U
Contents
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EBARA
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