Setting The Warning Value For N2 Flow Rate - EBARA ESA25-D Instruction Manual

P.40

6.3.3 Setting the WARNING value for N2 flow rate

PRG.
SET POINT
N2 WARNING?
PRG.
PM10U
SET POINT
ENTER
PUMP N2 LOW?
▲
▼
SET POINT
N2 0MODE?
▼
"▲" "▼" Use the up down arrow keys to change the setting value.
"▲" : Increase the setting value by 0.1 Pam
"▼" : Decrease the setting value by 0.1 Pam
Upper limit : 81.0 Pam
Lower limit : 2.2 Pam
Factory setting : 12.0 Pam
Reset value for WARNING : Set value+1.0 Pam
N2 FLOW LOW
ENTER
##.# Pam3/s
N2 0MODE
ENTER
##.# Pam3/s
3
/s
3
/s
3
/s
3
/s(PUMP N2 LOW)/1.0 Pam
3
/s(PUMP N2 LOW)/7.4 Pam
Setting
ENTER Completed
Setting
ENTER
Completed
3
/s(N2 0MODE)
3
/s(N2 0MODE)
3
/s
EBARA
CORPORATION