Setting The Warning Value For The Pump N2 Flow; Setting The Warning Value For The Back Pressure (Option) - EBARA ESA300W Instruction Manual

6.3.6 Setting the WARNING value for the pump N2 flow

SET POINT
N2 FLOW LOW?
Use the up and down arrow keys to change the setting value.
▲ ▼
▲ : Increase the setting value by 0.1 Pam
▼ : Decrease the setting value by 0.1 Pam
Upper limit 81.0 Pam
Lower limit 2.0 Pam
Factory setting 4.0 Pam
Reset value for WARNING set value +1.0 Pam

6.3.7 Setting the WARNING value for the back pressure (option)

SET ALARM SP
BACK PRES.?
Use the up and down arrow keys to change the setting value.
▲ ▼
: Increase the setting value by 0.5 kPa.
▲
: Decrease the setting value by 0.5 kPa.
▼
Upper limit : 20.0 kPa
Lower limit : 5.0 kPa
Factory setting : 10.0 kPa
WARNING reset value : Set value –2.0 kPa
ＰＲＧ．
N2 FLOW LOW
ENTER
# # ．# Pam
3
/s
3
/s
3
/s
PRG.
BACK PRES.SP
ENTER
##.# kPa
ENTER
3
/s
3
/s
3
/s
3
/s
ENTER
Use the keys, "▲" and "▼" to set.
EBARA
(43)
SETTING COMPLETED
Setting
done
CORPORATION