Warning; Operation Status Control; Moving The Pump; Preparation - EBARA A70W Instruction Manual

and pump section.
During pump operation the central processing unit monitors all operating conditions, including
power supply, cooling water flow, N
temperature, motor current and suction pressure.
Pump operation "rides through" a transient power outage up to 500 milliseconds long.
(Two-second ride through is available as an option.)

3.2.1 Warning

To improve the reliability of the vacuum exhaust system, the pump control scheme generates
two levels of trouble warning: ALARM and TRIP.
An ALARM signal draws attention to an operating parameter value that has exceeded the
normal operating range; it does not signify that danger is imminent. The pump will continue to
operate in this condition, which enables the operator to complete the wafer cycle before
checking the pump.
The pump will stop automatically and generate a TRIP signal output if a parameter
approaches a mechanical safety limit.
Contact EBARA Corporation for details on checking the ALARM and TRIP setting conditions.

3.2.2 Operation Status Control

To facilitate operation status control and daily inspection, the LCD controller displays the
sensor data.
The LCD controller displays all ALARM and TRIP signals. For remote operation and
monitoring, the signals are available individually and as collective outputs.

3.3 Moving the Pump

3.3.1 Preparation

Raise all four adjuster feet fully before moving the pump; otherwise, an obstacle on the floor
may cause the moving pump to tip over.
gas flow, lubrication oil level, casing and motor coil
2
fully
raised
Caster
Adjuster
f
EBARA Corporation
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