Setting The Warning Value For The Pump N2 Flow; Setting The Warning Value For The Back Pressure (Option) - EBARA ESA70W Instruction Manual

6.3.3 Setting the WARNING value for the pump N2 flow

PRG.
SET POINT
ENTER
N2 WARNING?
PRG.

6.3.4 Setting the WARNING value for the back pressure (option)

PRG.
SET POINT
BACK PRESSURE?
SET POINT
PUMP N2 LOW?
▲
▼
SET POINT
N2 0MODE?
▼
"▲" "▼" Use the up down arrow keys to change the setting value.
"▲" : Increase the setting value by 0.1 Pam
"▼" : Decrease the setting value by 0.1 Pam
Upper limit : 81.0 Pam
Lower limit : 2.2 Pam
Factory setting : 16.4 Pam
Reset value for WARNING : Set value+1.0 Pam
SET POINT
ENTER
PUMP N2 LOW?
"▲" "▼" Use the up down arrow keys to change the setting value.
"▲" : Increase the setting value by 0.5 kPa
"▼" : Decrease the setting value by 0.5 kPa
Upper limit : 30.0 kPa
Lower limit : 5.0 kPa
Factory setting : 20.0 kPa
Reset value for WARNING : Set value -2.0 kPa
N2 FLOW LOW
ENTER
##.# Pam3/s
N2 0MODE
ENTER
##.# Pam3/s
3
/s
3
/s(PUMP N2 LOW)/1.0 Pam
3
/s(PUMP N2 LOW)/7.4 Pam
BACK PRES. SP
ENTER
##.# kPa
(33)
Completed
ENTER
ENTER
Completed
3
/s
3
/s
3
/s(N2 0MODE)
3
/s(N2 0MODE)
3
/s
ENTER
EBARA
Corporation
Setting
Setting
Setting
Completed