Ultimate Pressure; Cooler Inspection And Cleaning - EBARA 80?25 Installation Operation & Maintenance

EBARA Multi-Stage Dry Vacuum Pumps
Flow: Motor and module:
Gas coolers:
Pressure (Operating)
Max:
Temperature (max)
5.9

Ultimate Pressure

The rated ultimate pressure is measured at the pump inlet with the Nitrogen purge on
(at factory specifications).
Confirm that the ultimate pressure is not above the rated value, or the value obtained at
initial start-up. (For initial values, See "Start-Up & Trial Run". For pump specifications,
See "80x25 Specifications".)
If the ultimate pressure is above the rated value, or above the value obtained at start-
up, check for the following.
1. Leakage in the vacuum chamber or the connecting piping between the chamber
and the pump, or both.
2. Improper adjustment of the Nitrogen flow needle valves.

5.10 Cooler Inspection and Cleaning

DANGER
!
Respirators may be required when inspecting or cleaning coolers (Process
dependent).
WARNING
!
Wear protective gloves when performing maintenance on the coolers.
WARNING
!
Protective eyeware should be worn when inspecting or cleaning coolers.
WARNING
!
930601-P
5.0-8.0 lpm
0.8-1.2 lpm
2
1.0-2.0 kgf/cm
2
2.0 kgf/cm
30°C
Pump Maintenance
1.3-2.1 gpm.
0.21-0.32 gpm.
14-28 psi.
28 psi.
86°F
28