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2. Product Description
2.1 Outline
The EV-PA Series dry vacuum pump has a compact design and includes various sensors and
controls to enhance reliability and operation.
This pump is suitable for use on clean and non-corrosive gases. Do not use eplosive, flammable,
toxic, and water, codensability or corrosive substances.
2.1.1 Pump Module
The pump is a Dry vacuum pump which rotates a pair of non-contact rotors synchronized by magnet
coupling. In the unit, a Booster Pump (BP) and the Main Pump (MP) are connected in series for
ventilation.
2.1.2 Cooling Fan
Because the pump compresses gas from a vacuum to atmospheric pressure, compression heat is
generated. Therefore cool the pump with cooling fan.
2.1.3 Exhaust
A check valve is built into the pump unit to prevent reverse flow of gas from the exhaust through the
pump to the vacuum chamber when pump is stopped.
2.1.4 Gas ballast
Introduce gas ballast to prevent condensation of vapour and improve pumping of light gases. Air or
nitrogen gas can be introduced to the Main Pump (MP) through the ballast port. The gas ballast
flowrate is set by built-in orifice. (at atomosphere pressure)
2.2 Control System
EV-PA Series dry vacuum pumps have a built-in measuring unit consisting of a Circuit Protector (CP),
Noise Filter (NF) and control source. During pump operation all operating conditions are monitored,
including power supply and electric current for motor. Continuous operation is possible when there is
a momentarily power failure (85V or less) of 1 sec or less.
2.2.1 Warning and Alarm
To assure the reliability of the pump as a vacuum exhaust system, the pump protection system
generates two levels of alarm： WARNING and ALARM.
A WARNING signal is generated when pump operation exceeds the normal range. It therefore only
draws attention that the normal operating values are not adhered to but does not signify that danger
is imminent. The pump will continue to operate in this condition.
An ALARM signal output is generated and the pump will stop automatically when the upper
mechanical safety limit is reached during pump operation.
All WARNING and ALARM signals are displayed on the front panel. For remote operation and
monitoring, the signals are available as individual and group output.
Contact EBARA for details on checking the WARNING and ALARM setting condition.
PM10U
17
P.
EBARA
CORPORATION
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