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2. Product Description
2.1 Outline
This pump has a compact design and includes controls to enhance reliability and operation.
This pump is suitable for use on clean and non-corrosive gases. Do not use explosive, flammable,
toxic or corrosive substances.
2.1.1
Pump Module
The pump is Roots type Dry vacuum pump, which rotates a pair of non-contact multi-stage rotors,
synchronized by timing gears.
The timing gears and bearings are enclosed in a compartment that is independent of the casing. For
lubrication Perfluoro-Polyether (PFPE) oil and grease are used. The pump is factory-filled with
lubrication oil.
Replenish or replace only with the recommended oil grades shown in Specification Table 2.1.
2.1.2
Cooling Fan
Because the pump compresses gas from a vacuum to atmospheric pressure, compression heat is
generated. Therefore cool the pump with cooling fan.
Place the pump enough spaces from the stationary section.
2.1.3
Exhaust
A check valve is provided as a standard accessory to prevent reverse flow of gas from the exhaust
through the pump to the vacuum chamber when pump is stopped.
2.2 Control System
This pump has a built-in unit consisting of a Circuit Protector (CP), Noise Filter (NF), and Inverter.
During pump operation, some conditions are monitored, including electrical power and current for
motor. Continuous operation is possible when there is a momentarily power failure (170V or less) of
1sec or less.
2.2.1
Alarm Control System
To improve the reliability of the pump as a vacuum exhaust system, the pump protection system
generates an ALARM signal. This signal output is generated and the pump will stop automatically
when the upper mechanical safety limit is reached during pump operation.
Contact EBARA Corporation for details on checking the ALARM setting conditions.
All ALARM signal are displayed on the front panel. For remote operation and monitoring, the signal is
available as group output.
PM10U
FRONT / REAR / TOP
Both side
:
100 mm or more
:
50 mm or more
P.17
EBARA
CORPORATION
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