Cooling Water; Exhaust; Control System; Warning - EBARA ESA25-D Instruction Manual

P.4

3.1.3 Cooling Water

Because the pump compresses gas from a vacuum to atmospheric pressure,
compression heat is generated. Therefore, cooling water should be supplied
through the motor and cooling plate of casing. The cooling water connector
takes the form of a coupler for easy connection and disconnection.

3.1.4 Exhaust

A check valve is provided to prevent reverse flow of gas from the exhaust
through the pump to the vacuum chamber when pump is stopped.

3.2 Control System

This pump has a built-in measuring unit consisting of a fuse for power line, an
electro-magnetic switch and a control circuit.
To improve reliability and safety, the condition of each utility and pump section is
monitored by a sensor.
During pump operation all operating conditions are monitored, including power
supply, cooling water flow, N gas flow, casing and motor coil temperature, and
2
motor current.
Continuous operation is possible when there is a momentarily power failure of
1 sec or less.

3.2.1 Warning

To assure the reliability of the pump as a vacuum exhaust system, the pump
protection system generates two levels of alarm： WARNING and ALARM.
A WARNING signal is generated when pump operation exceeds the normal
range. It therefore only draws attention that the normal operating values are not
adhered to but does not signify that danger is imminent. The pump will continue
to operate in this condition.
An ALARM signal output is generated and the pump will stop automatically when
the upper mechanical safety limit is reached during pump operation.
EBARA
CORPORATION
PM10U