Cooling Water; Exhaust; Control System; Warning - EBARA EV-S20 Instruction Manual

P.4

3.1.3 Cooling Water

Because the pump compresses gas from a vacuum to atmospheric pressure,
compression heat is generated. Therefore cool the pump with cooling water.
The cooling water connector takes the form of a coupler for easy connection and
disconnection.

3.1.4 Exhaust

A check valve is built into the pump unit to prevent reverse flow of gas from the
exhaust through the pump to the vacuum chamber when pump is stopped.

3.2 Control System

These pumps have a built-in unit consisting of a Circuit Protector (CP), Noise
Filter (NF), control source.
To improve reliability and safety, the condition of each utility and pump section is
monitored by a sensor.
During pump operation all operating conditions are monitored, including power
supply, cooling water flow, N gas flow, casing and motor coil temperature, motor
2
speed, and electric power for motor.
Continuous operation is possible when there is a momentarily power failure (170V
or less) of 1 sec or less.

3.2.1 Warning

To assure the reliability of the pump as a vacuum exhaust system, the pump
protection system generates two levels of alarm： WARNING and ALARM.
A WARNING signal is generated when pump operation exceeds the normal range.
It therefore only draws attention that the normal operating values are not adhered
to but does not signify that danger is imminent. The pump will continue to operate
in this condition.
An ALARM signal output is generated and the pump will stop automatically when
the upper mechanical safety limit is reached during pump operation.
EBARA
CORPORATION
PM10U