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EBARA Multi-Stage Dry Vacuum Pumps
2.0 Product Overview
NOTICE
!
The descriptions and instructions included in this manual are for a typical pump
installation. Documentation specific to this pump installation has been included
in the Attachments section. This section is located at the back of the manual.
Please refer to the Attachments section for installation-specific information
before attempting to operate this system.
NOTICE
!
The entire manual should be reviewed thoroughly before operating the pump.
This section is presented as an overview only. This section is not meant as a
substitute for the other sections of this manual.
2.1
Summary of Requirements
2.1.1
Nitrogen Flow
Nitrogen flow serves two purposes: (1) sealing and (2) dilution. Needle valves are
preset at the factory and should not be adjusted.
General Settings: Flow meter wide open. Flow will stabilize around 5-8 lpm.
2.1.2
Cooling Water
The purpose of the cooling water is to cool motors, gears, and gas coolers (interstage
coolers). Pressure must be less than 4 kgf/cm
pressure across the cooling water inlet-to-outlet is 1-2 kgf/cm
flow rate is 5-8 lpm. Only 1 lpm of the total 5-8 lpm flow is diverted to the intercoolers.
The reason for this is to prevent chemical build-up in the coolers due to excessive
cooling.
If the cooling water is restricted for any length of time with the pump(s) running, the rear
pumps could overheat and seize. All pumps are designed to shut down if the cooling
water flow drops below 3-4 lpm (after a 3-minute time delay). Normal operating
temperature is process and pump condition dependent.
2.1.3
Lubricating Fluid
Ebara dry pumps use only perfluorinated polyether (PFPE) fluid to lubricate the pump's
bearings and gears. This fluid is non-flammable and inert. This is the lubricating fluid
referred to throughout the manual.
930601-P
2
(60 psi). The required differential
2
(14-28 psi). The required
Overview
4
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