Detailed Specifications - EBARA ESA70W Instruction Manual

3.4 Detailed Specifications

The following tables and figures should be consulted for pump specification,
dimension and performance details.
Model
Pumping Speed(50/60Hz)
Ultimate Pressure(50/60Hz)
Gas Inlet
Connection
Gas Outlet
Motor
Connection
Pressure
Cooling
[Gauge Press.]
Water
Flow rate
Temperature
Connection
Pressure
N2
[Gauge Press.]
Gas
Approx. Flow rate*
[N
Duct Connection
Venti- Approx. Flow rate
lation Pressure
Lubrication
Oil
Quantity
Approx. Weight
Phase/Volt/Freq
Current Rating
Power
Connection
Control Signal
[Note] * The ambient temperature of the pump installation place shall be 30 degrees
centigrade of lower.
Table 3.1 Specification
1/4" Tube Fitting (Same as Swagelock or equivalent)
-0 Mode]
2
BARRIERTA J100ES
Brand
BARRIERTA J100
Model ESA70W
7000/8400 L/min
0.27 / 0.13Pa
NW50
NW40
2P 2.2kW + 2P 3.7kW
Coupler (Rc 3/8)
Supply
Differential Press.
3.5 - 8 L/min
Max. 30 deg C
Supply : 0.1-0.7Mpa
[Setting : 0.04-0.07Mpa]
24～27 Pam
[4.7 Pam
d50 mm×L50 mm
0.5 m
-196 Pa
0.8 L
380kg
3 Phase , 200V (50Hz), 200-220(60Hz)
29.5A
Japan Avitation Electronics Industry Co.,Ltd.
JL04HV-2E22-22PE-B
D-sub 15Pin + D-sub 25Pin
Model ESA70WN
0.4 / 0.27Pa
: Max. 0.4Mpa
: Min. 0.1Mpa
3
/s
3
/s]
3
/min
(NOK)
(NOK)
EBARA
Corporation
(7)