Detailed Specifications - EBARA ESA25-D Instruction Manual

3.5 Detailed Specifications

The following tables and figures should be consulted for pump specification,
dimension and performance details.
Model
Pumping Speed(50/60Hz)
Ultimate Pressure(50/60Hz)
Connection
MOTOR
Cooling
Water
N
2
Gas
Duct
Venti-
*
Lation
Lubrication
Oil
Approx. Weight
Power
Supply
Control Signal
Airborne noise test data [dB (A)] **
[Note] * The ambient temperature of the pump installation place shall be 30
degrees of centigrade of lower.
** Test condition
(1) Pump is operating under ultimate pressure.
(2) Measured at 1m distance from cover and 1.6m height from floor.
PM10U
Table 3.1 Specification
Gas Inlet
Gas Outlet
Connection
Pressure
[Gauge Press.]
Flow rate
Temperature
Connection
Pressure
[Gauge Press.]
Approx. Flow rate
[N -0 Mode]
2
Connection
Pressure
Approx. Flow rate
Brand
Quantity
[200V mode] 3 Phase,200V(50Hz)/200-220V(60Hz)
Phase/Volt/Freq.
[400V mode] 3 Phase ,380-400V(50Hz),/380-440V(60Hz)
[200V mode]
Current Rating
[400V mode]
Connection
SCCR
Model ESA25-D
2500 / 3000 L/min
5.3/4.0
NW50
NW40
2P 3.7 kW
Coupler(Rc3/8)
Supply: Max. 0.4MPa
Differential Press. : Min. 0.1MPa
3.5 - 8 L/min
Max. 30 deg C
1/4" Tube Fitting(Same as Swagelok or equivalent)
Supply : 0.1 - 0.7MPa
[Setting : 0.04 - 0.07MPa]
17 - 20 Pa m
[3.8 Pa m
d 50 mm x L 50 mm
-196 Pa
0.5 m
BARRIERTA J100ES (NOK)
BARRIERTA J100 (NOK)
0.4 L
240 kg
17.8 / 17.0 A (50/60 Hz)
8.9 / 8.5 A (50/60 Hz)
Japan Aviation Electronics Industry Co.,Ltd.
JL04HV-2E22-22PE-B
5kA
D-sub 15 Pin + D-sub 25 Pin
63
P.9
Pa
3
/s
3
/s]
3
/min
EBARA
CORPORATION