Detailed Specifications - EBARA ESA500W Instruction Manual

3.4 Detailed Specifications

The following tables and figures should be consulted for pump specification,
dimension and performance details.
Pumping Speed (50 / 60Hz)
Ultimate Pressure
Connection
Approx. Power at Ultimate Pressure
(Motor Power)
Cooling
Water
Uti-li
ty
N2
Gas
Duct
Venti-
*
Lation
Lubrication
Oil
Approx. Weight
Power
Supply
Control Signal
[Note] * The ambient temperature of the pump installation place shall be 30
degrees of centigrade of lower.
PM10U
Table 3.1 Specification
Model
Gas Inlet
Gas Outlet
Connection
Pressure
[Gauge Press.]
Flow rate
Temperature
Connection
Pressure
[Gauge Press.]
Approx. Flow rate
Connection
Pressure
Approx. Flow rate
Brand
Quantity
Phase/Volt/Freq.
Current Rating
Power capacity
Connection
Model ESA500W
47000 / 50000 L/min
5.1kW : 50Hz , 6.7kW ; 60Hz
Coupler(Rc3/8)
Differential Press. : Min. 0.28MPa
Supply: Max. 0.5MPa
6 - 9 L/min
Max. 30 deg C
1/4" Tube Fitting(Same as Swagelok)
Supply : 0.15 - 0.7MPa
[Setting : 0.09 - 0.12MPa]
8.5 ～ 11.0 Pa m
d 50 mm x L 50 mm
0.5 m
BARRIERTA J100ES (NOK)
[200V Model] 3 Phase , 200V (50Hz), 200-220V (60Hz)
[460V Model] 3 Phase , 440V (50Hz), 440-480V (60Hz)
[200V Model]
[460V Model]
41.3 kVA (50 / 60Hz)
[Breaker] ：M8 Crimp-style circle terminal
[Earth] ：M5 Crimp-style circle terminal
D-sub 15 Pin + D-sub 25 Pin
1.0 Pa
ISO160
NW50
33.2 kW
3
/s
-196 Pa
3
/min
1.5 L
750 kg
175A trip
75A trip
EBARA
CORPORATION
P.7