Detailed Specifications; Specifications - EBARA EV-PA 250 Instruction Manual

Dry vacuum pump
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18
P.

2.3 Detailed Specifications

The following tables and figures are consulted for pump specification, dimension and performance
details.

2.3.1 Specifications

(Gas ballast setting)
(Gas ballast setting)
Connection
at ultimate pressure
Ambient Temperature *
Power
Supply
Gas
Ballast **
Acoustic noise test data ***
*
The ambient air temperature must be less than 30℃.
** The gas ballast flow rate is set by a built-in orifice. (at atmosphere pressure)
When the gas ballast is supplied with high pressure, please set the supply pressure
(0.05MPa(Gage pressure) or less) and set the gas ballast flow rate to 8.4Pam3/s.
The pumping speed and the ultimate pressure might be effected by the gas ballast frow rate.
Install valve, check valve, and filter to the ballast port if necessary.
The ability for moisture exhaust in the gas ballast is 10g/hr at the maximum.
*** Measured on the following condision
(1) Pump is operating under ultimate pressure. (no gas ballast)
(2) Measured at 1m distance from cover.
PM10U
Model
Pumping Speed
Ultimate Pressure
Gas Inlet
Gas Outlet
Approx. power
(Max Power)
Approx. Weight
Cooling System
Phase/Volt/Freq
Power capacity
Connection
Connection
Flow rate
Gas type
Control Signal
CP Rating
Table 2.1 Specification
EV-PA250
230 L/min
(200L/min)
NW25
240W
(380W)
16kg
Single Phase , 100-230V±10% , 50/60Hz
450VA
HIRAKAWA HEWTECH Corp.
> 8.4 Pam
3
EV-PA500
500 L/min
(430L/min)
0.5 Pa
(2.0Pa)
NW40
NW 25
270W
(600W)
21 kg
5℃ to 30℃
Air Cooling
660VA
CM-11
G1/8 Female
/s (at atmosphere pressure)
Dry Air or N
2
D-sub 15Pin
10A
58 dB(A)
EBARA
CORPORATION

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Ev-pa 500

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