Detailed Specifications - EBARA ESA300W Instruction Manual

3.4 Detailed Specifications

The following tables and figures should be consulted for pump specification,
dimension and performance details.
Model
Pumping Speed(50/60Hz)
Ultimate Pressure
Gas Inlet
Connection
Gas Outlet
Max Power
Approx. power
at ultimate pressure
Connection
Cooling
Pressure
Water [Gauge Press.]
Flow rate
Temperature
Connection
N2 Pressure
Gas [Gauge Press.]
Approx. Flow rate*
Duct Connection
Venti- Pressure
lation Approx. Flow rate
Lubrication
Brand
Oil
Quantity
Approx. Weight
Phase/Volt/Freq
Earth leakage
Breaker
Power
Supply Power capacity
Connection
Control Signal
Table 3.1 Specification
Model ESA300W
28000/30000 L/min
0.53Pa
6.6kW :50Hz , 7.3kW :60Hz
Coupler (Rc 3/8)
Supply
Differential Press.
Max. 30 deg C
1/4" Tube Fitting (Same as Swagelock or equivalent)
Supply : 0.15-0.7Mpa
[Setting : 0.09-0.12Mpa]
3
7.5～10.5 Pam /s
d50 mm×L50 mm
0.5 m
BARRIERTA J100ES
[200V model] 3 Phase , 200V (50Hz), 200-220(60Hz)
[400V model] 3 Phase , 380-400V (50Hz), 400-440(60Hz)
[460V model] 3 Phase , 440V (50Hz), 440-480(60Hz)
[200V model] 100A trip
[400V model] 50A trip
[460V model] 50A trip
[200V model] M8 Crimp-style circle terminal
[400V model] M5 Crimp-style circle terminal
[460V model] M5 Crimp-style circle terminal
D-sub 15Pin + D-sub 25Pin
Model ESA300W-H
1.3Pa
ISO100
NW 40
19.5 kW
: Max. 0.5Mpa
: Min. 0.25Mpa
6-9 L/min
78～82 Pam
-196 Pa
3
/min
(NOK)
1.2 L
700kg
23.7 kVA
EBARA
(17)
3
/s
CORPORATION