Product Description; Outline; Pump Module; N2 Gas - EBARA ESA300W Instruction Manual

3. Product Description

3.1 Outline

This dry vacuum pump has a compact design and includes various sensors and
controls to enhance reliability and operation.

3.1.1 Pump Module

The pump is a roots type vacuum pump which rotates a pair of non-contact
multi-stage rotors synchronized by timing gears. In high-capacity units, a Booster
Pump (BP) is connected in series with the Main Pump (MP) are connected in
series for ventilation.
The timing gears and bearings are enclosed in a compartment that is independent
of the casing. For lubrication Perfluoro-Polyether (PFPE) oil and grease are used.
The pump is factory filled with lubrication oil. Use only the recommended
lubrication oil grades shown in specification Tables 3.1 for replenishing or
replacing.

3.1.2 N2 Gas

Introduce nitrogen gas to dilute the hazardous gases to an unharmful level.
Properly connect the nitrogen gas line to the purge port provided according to the
instructions in Table 3.1 and the descriptions in Section 4.2.3. In the cases the
gas concentration may become higher than the specified for safe gas exhaust,
introduce the nitrogen gas to lines to the exhaust outlet. The tool user shall
provide the purge port for this purpose.
N gas is also required to supply to seal the shaft section. This protects the
2
penetration to bearing section, such as corrosive gas.
To reduce pump corrosion due to process gas or accumulation of reaction
by-products, N gas is supplied to each pump component as dilution purge gas.
2
Stopping the dilution N
not produce corrosion and reaction by-products.
The correct amount of N
by adjusting the regulation pressure to the specified value.
The nitrogen gas selector is locating on the right side of the unit, facing the LCD
controller and other utility connectors.
with a selector valve can save N
2
gas is supplied for those two types of purge operation,
2
(13)
gas, when process does
2
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CORPORATION