Product Description; Outline; Pump Module; Gas (Model Ev-S**P / Model Ev-S**N) - EBARA EV-S20 Instruction Manual

3. Product Description

3.1 Outline

These pumps have a compact design and includes various sensors and controls
to enhance reliability and operation.

3.1.1 Pump Module

The pump is Roots type vacuum pump which rotates a pair of non-contact
multi-stage rotors synchronized by timing gears.
The timing gears and bearings are enclosed in a compartment which is
independent of the casing. For lubrication Perfluoro-Polyether (PFPE) oil and
grease are used.
The pumps of this series are factory filled with lubrication oil. Use only the
recommended lubrication oil grades shown in specification Table 3.1-3.4 for
replenishing or replacing.
3.1.2 N

Gas (MODEL EV-S**P / MODEL EV-S**N)

2
Introduce nitrogen gas to dilute the hazardous gases to an unharmful level.
Properly connect the nitrogen gas line to the purge port provided according to the
instructions in Table 3.1 and the descriptions in Section 4.2.3. In the cases the
gas concentration may become higher than the specified for safe gas exhaust,
introduce the nitrogen gas to lines to the exhaust outlet. The tool user shall
provide the purge port for this purpose.
N gas is also required to supply to seal the shaft section. This protects the
2
penetration to bearing section, such as corrosive gas. To reduce pump corrosion
due to process gas or accumulation of reaction by-products, N
each pump component as dilution purge gas. Stopping the dilution N
selector valve can save N
reaction by-products. The correct amount of N
types of purge operation, by adjusting the regulation pressure to the specified value.
The nitrogen gas selector is locating on the right side of the unit, facing the utility
connectors. It is under the outer cover.
PM10U
gas, when process does not produce corrosion and
2
gas is supplied to
2
gas is supplied for those two
2
EBARA
P.3
with a
2
CORPORATION