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Figure B–5: Roughing pump vacuum connection details
NW40 clamp
Vacuum hose (from rear of the instrument)
Exhaust tubing
NW40 clamp
Exhaust silencer
NW40 clamp and exhaust filter (supplied with the EBARA roughing pump
installation kit)
Control signal connector
Power connector
March 17, 2021, 715005046 Ver. 03
Page 184
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