6.2 Maintenance Parts List
Following labels are attached to pump covers. When they are hard to read for discoloring or peeling
off, please stick them again as directed.
[WARNING]
[WARNING]
[WARNING]
[CAUTION]
6.3 Instruction for cleaning
The covers of the pump can be clean with an alcohol-soaked cloth. Do not damage the labels of the
pump.
6.4 Repair and Serving
If any abnormal symptoms other than those displayed on the LCD controller appear, take action in
accordance with the instruction of Section 8. "Troubleshooting".
If trouble occurs, to order repairs or servicing. Please contact EBARA CORPORATION or an
authorized Agent/Distributor, and provide the information on the nameplate and details of the problem.
Please contact EBARA.
PM10U
Table 6.1 Labels
Label's Name
HAZARDOUS VOLTAGE WARNING LABEL
HIGH TEMPERATURE WARNING LABEL
HEAVY OBJECT WARNING LABEL
CHARGE MARK LABEL
39
P.
Parts No.
C-7000-009-1100
C-7000-009-1200
C-7000-010-0400
C-7000-001-9600
EBARA
CORPORATION