Spare (Maintenance) Parts List; List Of Wastes During Maintenance - EBARA ESA70W Instruction Manual

8.6 List of wastes during maintenance

Table 8.4 lists wastes from general user maintenance. Dispose the wastes
properly according to your local waste disposal regulations in each area.
Table 8.4 List of wastes during maintenance
Part
Lubricant oil
Lithium battery
O-ring
Equipped on
Inside of pump module.
See section 8.4.
CPU board.
(No necessary to replace at
usual maintenance.)
Connection of vacuum line
Remarks
Refer to Appendix 1,2 or Material
Safety Data Sheet.
Refer to Appendix 3 or Material
Safety Data Sheet.
Usual industrial waste.
EBARA
(57)
Corporation