Spare (Maintenance) Parts List - EBARA A70W Instruction Manual

(34)

6.4 Spare (Maintenance) Parts List

Pump maintenance requires the following parts at customer site.
1. Standard Consumable
Item
PFPE oil
2. Parts Recommended for Safe Operation
Item
O-ring (Viton A)
3. Parts Recommended for Quick Maintenance
Item
Exhaust check valve
4. Recommended Spare Parts (not needed for each pump)
Item
Oil level switch
Water flow sensor
Pump gas flow sensor (seal) 3.4 Pam3/s
N flow sensor
2
T/C bolt
N gas pressure regulator
2
(EC: EBARA CORPORATION; ETI: EBARA TECHNOLOGIES INCORPORATED)
Table 6.2
Type
FOMBLIN Y-L VAC 25/6
BARRIERTA J100
DEMNUM S-65
KRYTOX VPF 1525
Type
NW25
NW40
G55 (For exhaust check
valve)
Type
32X80L
Type
NOR. CLOSE
20 L/min
84.4 Pam3/s
T TYPE, M8
R31-200-C121
EC Part No.
CER01-4002
EC Part No.
CER01-4746
CER01-4747
CER01-4402-2
EC Part No. ETI Part
No.
CER01-4402 980083
EC Part No. ETI Part
No.
CER90-6515 -----
CER90-6018 942020
CER90-6012
CER90-6017 -----
CER90-6035 913046
CER01-4420 980086
EBARA Corporation
ETI Part
No.
927009
ETI Part
No.
980928
980927
923111