Spare (Maintenance) Parts List - EBARA ESA300W Instruction Manual

8.5 Spare (Maintenance) Parts List

Following parts are needed for maintenance in customers' site.
1. Standard consumption Part.
Parts Name
PFPE oil
2. Recommendable Part for Safe Operation.
Parts Name
O-ring (Viton A)
3. Recommendable Parts for Quick Maintenance.
Parts Name
Exhaust check valve
4. Recommendable Spare Parts. (Not needed for each pump.)
Parts Name
Water flow sensor
N2 flow sensor
N2 gas pressure regulator
(EC:EBARA CORPORATION, ETI:EBARA TECHNOLOGIES INCORPORATED)
Following labels are attached to pump covers. When they are hard to read for
discoloring or peeling off, please stick them again as directed in the Warning Label
drawings .
[DANGER] HAZARDOUS WAIGHT DANGER LABEL
[WARNING] HAZARDOUS VOLTAGE WARNING LABEL
[WARNING] HIGH TEMPERATURE WARNING LABEL
[WARNING] HAZARDOUS MATERIAL WARNING LABEL
[CAUTION] CHARGE MARK LABEL
Table. 8.2
Type
BARRIERTA J100ES
Type
NW40
G55 (For Exh. check valve)
Type
32X80L
Type
20 L/min
CME0101
R31-200-C121
Table. 8.3 Labels
Label Name
(64)
EC Part No.
C-0402-000-0111
EC Part No.
C-1210-352-0001
C-1210-089-0201
EC Part No.
C-2244-031-0001
EC Part No.
C-5137-008-0001
C-5138-062-0111
C-2250-101-0001
Part No.
C-7110-316-0001
C-7110-313-0001
C-7110-312-0001
C-7110-314-0001
C-7110-315-0001
EBARA
CORPORATION