Setting The Pump N2 Flow - EBARA ESA500W Instruction Manual

P.34

6.3.6 Setting the pump N2 flow

SET POINT
N2 WARNING?
ENTE
ＰＲＧ．
SET POINT
N2 FLOW LOW?
SET POINT
N2 FLOW DLY?
△ ▽
△
▽
Upper limit : 81.0 Pam
Lower limit : 2.2 Pam
Factory Setting : 5.0 Pam
(Reset value for WARNING set value of flow low: +1.0 Pam
PM10U
PRG.
ENTER
PRG.
ENTER
Use the up and down arrow keys to change the setting value.
： Increase the setting speed / delay time by 0.1 Pam
： Decrease the setting speed / delay time by 0.1 Pam
3
/s , 60 sec
3
/s , 5 sec
3
/s , 60 sec
N2 FLOW LOW
3
##.# Pam /s
Use the keys, " △ " and " ▽ " to set.
N2 FLOW LOW DLY
## SEC
Setting
ENTER
done
Setting
ENTER
done
3
/s or sec
3
/s or sec
3
/s)
EBARA
CORPORATION