Troubleshooting (4) Option - EBARA EV-S20 Instruction Manual

10.4 Troubleshooting (4) Option

Display
ALARM:
WATER LEAKAGE
ALARM :
BACK PRESS.HIGH
WARN:
PRESS.HIGH ##.#
ALARM:
EMERGENCY STOP
After you have taken the remedial actions above, reset the pump. If the problem that has caused the
ALARM signal still remains, the ALARM display will appear again even after you have reset.
PM10U
Symptom
Water leakage Tube fittings are loosened.
Instrument failure
Exhaust pressure Exhaust valve is closed.
rises.
Accumulation of
by-products in pipes.
Instruments failure
Exhaust pressure Exhaust valve is closed.
rises.
Accumulation of
by-products in pipes.
Instruments failure
Emergency Stop Stop by emergency Stop
switch button.
Check Item
Re-tighten.
Replace instrument.
Check exhaust pipe.
Check exhaust pipe.
Replace instruments.
Check exhaust pipe.
Check exhaust pipe.
Replace instruments.
Check that pump can be
operated and turn the
button head to release
lock.
P.94
Corrective Action
EBARA
CORPORATION