Troubleshooting; Basic Trouble - EBARA EV-PA 250 Instruction Manual

8. Troubleshooting

8.1 Troubleshooting (1) Basic trouble
Abnormal symptom
Circuit Protector is
activated.
Nothing appears on Pump
Switch
Pump does not start when
applying START button.
Pump does not start when
entering external
"Pump start" signal input.
Abnormal noise
Excessive vibration
Vacuum pressure increase. Leak from vacuum piping.
!
Keep the power supply to the pump turned off until you have finished the wiring and
connecting work. Also remove the power connector and interrupt the Circuit Protector (CP)
during this.
!
Avoid contact and keep inflammable substances out of reach. Do not remove the outer
cover during operation. The pump unit and the inlet piping and exhaust piping will remain
at a high temperature during operation and for a short time after the pump has stopped.
!
Check for leaks after you have installed and maintainance the pump.
PM10U
Check Item
Incorrect wiring
Short circuit
No power supply to pump.
Connector is not connected.
CP is not ON.
"Remote" mode has been selected.
Start-up conditions are not satisfied.
Instrument failure
A time of pressing START is not
enough.
"Local" mode has been selected.
Start-up conditions are not satisfied.
Instrument failure
A length of START signal is not
enough.
Pump is not staible.
Some object is making contact with the
outer cover.
The fastening screws of the outer
cover have worked themselves loose.
Parts of the pump are damaged.
DANGER
WARNING
CAUTION
Corrective Action
Check wiring.
Replace or overhaul pump.
Check power supply.
Connect power connector.
Place CP to ON.
Set switch to "Local" mode.
Satisfy all start-up conditions.
Replace instruments.
Hold down START for a second.
Set switch to "Remote".
Satisfy all start-up conditions.
Replace instruments.
Input the START signal over
300ms.
Install the pump on the flat
surface.
Remove the object.
Tighten the fastening screws.
Replace or overhaul pump.
Check piping.
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CORPORATION
41
P.