Troubleshooting (4) Option - EBARA ESA300W Instruction Manual

10.4 Troubleshooting (4) Option

Interrupt Earth Leakage Breaker (ELB) before starting on wiring and maintenance
work.
WARNING
Do not switch on the power supply to the pump until work is completed.
The pump casing and exhaust piping become extremely hot during operation and
for some time after stopping.
WARNING
Be sure that pump and exhaust piping do not come in contact with humans or
inflammable substances.
Do not remove the pump cover during operation.
Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and dangerous
WARNING
substances and in abnormal reactions due to the ingress of air into the
pump. When checking for gas leaks by pressurization,
please pressurize by less than 0.05 MPa into the purge port and
do check.
Display
ALARM: Water leakage
WATER LEAKAGE
ALARM: Exhaust pressure
BACK PRESS. HIGH rises.
ALARM: Emergency Stop
EMERGENCY STOP switch
WARN: BACK Disconnection of
PRESS. HIGH ##.# back pressure
sensor
WARN: BACK PRESS Back press sensor is
WIRE BROKE broken
Symptom Check Item
Tube fittings are loosened.
Instrument failure
Exhaust valve is closed.
Exhaust pipe is clogged with
by products.
Stop by emergency Stop
button.
Connector of back pressure
sensor is not connected.
Back pressure sensor failure
Instrument failure
(77)
Corrective Action
Re-tighten.
Replace instrument.
Check exhaust pipe.
Check exhaust pipe.
Check that pump can be
operated and turn the
button head to release lock.
Connect back pressure
sensor connector.
Replace back pressure
sensor.
Replace instrument.
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