Troubleshooting (4) Option - EBARA ESA70W Instruction Manual

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10.4 Troubleshooting (4) Option

Interrupt Earth Leakage Breaker (ELB) before starting on wiring and
WARNING
maintenance work.
Do not switch on the power supply to the pump until work is completed.
The pump casing and exhaust piping become extremely hot during operation and
WARNING
for some time after stopping.
Be sure that pump and exhaust piping do not come in contact with humans or
inflammable substances.
Do not remove the pump cover during operation.
Check for gas leaks after installing and maintaining the piping.
WARNING
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the ingress of air into
the pump. When checking for gas leaks by pressurization,
please pressurize by less than 0.05 MPa into the purge port and
do check.
Display
ALARM:
WATER LEAKAGE
ALARM:
BACK PRESS. HIGH
ALARM:
EMERGENCY STOP
WARN: BACK
PRESS. HIGH ##.#
WARN: BACK
PRESS
WIRE BROKE
Symptom
Water leakage
Exhaust pressure
rises.
Emergency Stop
switch
Disconnection of
back pressure
sensor
Back press sensor is
broken
Check Item
Tube fittings are loosened.
Instrument failure
Exhaust valve is closed.
Exhaust pipe is clogged with
by products.
Stop by emergency Stop
button.
Connector of back pressure
sensor is not connected.
Back pressure sensor failure
Instrument failure
Corrective Action
Re-tighten.
Replace instrument.
Check exhaust pipe.
Check exhaust pipe.
Check that pump can be
operated and turn the
button head to release lock.
Connect back pressure
sensor connector.
Replace back pressure
sensor.
Replace instrument.
EBARA
Corporation