Troubleshooting (3) Alarm - EBARA EV-S20 Instruction Manual

Multi-stage dry vacuum pump ce / semi / nrtl model 200-220v(50/60hz)
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10.3 Troubleshooting (3) ALARM

Display
ALARM: WATER
FLOW LOW
ALARM: CASING
TEMP H.HIGH
ALARM:BP MOTOR
TEMP H.HIGH
ALARM:MP MOTOR
TEMP H.HIGH
ALARM:BP MOTOR
OVERLOAD 2
ALARM:MP MOTOR
OVERLOAD 2
ALARM:BP MOTOR
STEP OUT
ALARM:MP MOTOR
STEP OUT
ALARM:
BP DRIVER ###
ALARM:
MP DRIVER ###
ALARM:
PHASE ERROR
ALARM:STARTFAIL
ALARM/WARN EXIST
After you have taken the remedial actions above, reset the pump. If the problem that has caused the
WARNING signal still remains, the WARNING display will appear again even after you have reset.
PM10U
Symptom
Water flow is reduced. Coupler is disconnected.
Pump casing temp.
rises.
Booster Pump (BP)
motor coil temp. rises.
Main Pump (MP)
motor coil temp. rises.
BP motor current
rises.
MP motor current
rises.
Booster Pump (BP)
motor step out.
Main Pump (MP)
motor step out.
Can not restart.
BP Motor driver
protection
MP Motor driver
protection
Can not restart
Open phase
Start fault
Check Item
Pressure is not sufficient.
Root valve is closed.
Water pipe is clogged.
Tube fittings are loosened. Re-tighten.
Instrument failure
Outlet & inlet pipes are
reverse. (flow value 0
L/min)
Pump back press. rises.
Increase of the gas load.
Cooling water flow is
reduced.
Accumulation of
by-products
Cooling water flow is
reduced.
Motor failure
Pump back press. rises.
Increase of the gas load.
Rotor makes contact.
(Accumulation of
by-products)
(Substance plunge)
Instrument failure
Pump back press. rises.
Increase of the gas load.
Rotor makes contact.
(Accumulation of
by-products)
(Substance plunge)
Instrument failure
Pump back press. rises.
Increase of the gas load.
Rotor makes contact.
(Accumulation of
by-products)
(Substance plunge)
Cooling water flow rate is
reduced.
Motor driver has broken
down.
Instrument failure
Incorrect wiring
Starting during
WARNING/ALARM status
Instrument failure
Corrective Action
Connect coupler.
Apply sufficient pressure.
Open valve.
Clean or replace piping.
Replace instrument.
Connect pipes correctly.
Check exhaust pipe.
Reduce the inflow gas amount.
Cool pump thoroughly and
reset.
Replace or overhaul pump.
Cool pump thoroughly and
reset.
Replace or overhaul pump.
Check exhaust pipe & silencer.
Reduce the inflow gas amount.
Replace or overhaul pump.
Replace instrument.
Check exhaust pipe.
Reduce the inflow gas amount.
Replace or overhaul pump.
Replace instrument.
Check exhaust pipe.
Reduce the inflow gas amount.
Replace or overhaul pump.
Cool pump thoroughly and
reset.
Replace motor driver.
Replace instrument.
Check power supply
Make sure that all starting
conditions are met.
Replace instrument.
EBARA
CORPORATION
P.93

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