Troubleshooting (2) Alarm - EBARA A70W Instruction Manual

Multi-stage dry vacuum pump
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8.2 Troubleshooting (2) ALARM

Display
Symptom
ALARM: WATER
Water flow
FLOW LOW
##.#
decreases.
ALARM: SEAL N2
Shaft seal. N
FLOW LOW
decreases.
ALARM: DIL. N2
Dilution N
FLOW LOW
##.#
decreases.
[w/ dilution mode]
*1
[w/ dilution mode]
ALARM: DIL. N2.
VALVE OPEN
Dilution N
open.
[w/o dilution mode]
*2
[w/o dilution mode]
ALARM: BP MOTOR
BP motor current
CURRENT HIGH##.#
rises.
ALARM: MP MOTOR
MP motor current
CURRENT HIGH##.#
rises.
ALARM: CASING
Casing temperature
TEMP HIGH ##.#
rises.
ALARM: BP-GEAR
BP gear side oil level
OIL LEVEL LOW
low
ALARM: BP-MOTOR
BP motor side oil
Check Item
Coupler is disconnected
Pressure is not sufficient
Source valve is closed
Water piping is clogged
Water piping leaks
Instruments are in failure
Inlet/Outlet is reverse
(Flow rate 0L/min)
flow
N
port is not connected
2
2
Primary pressure is
insufficient
Regulator setting low
. flow
2
N
piping is clogged
2
N
piping leaks
2
Instruments are in failure
Selector valve is closed *1
Selector valve is open *2
valve
2
Exhaust pressure rises
Rotor is in contact
(Byproducts)
(Substance plunge)
(Cooling water decrease)
(Gear or bearing damage)
Instruments are in failure
Power supply failure
Exhaust pressure rise
Duct ventilation is
insufficient
Byproduct is clogged
Cooling water decrease
Decrease of oil
Insufficient sealing N
Pump is inclined
Corrective Action
Connect coupler
Apply sufficient pressure
Open valve
Clean or replace piping
Check the fittings
Replace instruments
Connect correctly
Connect N
pipe fitting
2
Apply sufficient pressure
Increase pressure setting
Replace N
piping
2
Check the fittings
Replace instruments
Open the valve
Set to zero dilution mode"
Close the valve
Set to "standard mode"
Check exhaust piping
Replace or overhaul pump
Replace or overhaul pump
Increase water slowly
Replace or overhaul pump
Replace instruments
Check power supply
Check exhaust piping
Ventilate sufficiently
Replace or overhaul pump
Increase water slowly
Fill the lubricating oil
Check sealing N
2
Level the pump with
adjuster feet
EBARA Corporation
( 39)
ALARM
2

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