Troubleshooting (3) Alarm - EBARA ESA70W Instruction Manual

10.3 Troubleshooting (3) ALARM

Interrupt Earth Leakage Breaker (ELB) before starting on wiring and maintenance
WARNING
work.
Do not switch on the power supply to the pump until work is completed.
The pump casing and exhaust piping become extremely hot during operation and
WARNING
for some time after stopping.
Be sure that pump and exhaust piping do not come in contact with humans or
inflammable substances.
Do not remove the pump cover during operation.
Check for gas leaks after installing and maintaining the piping.
WARNING
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the ingress of air into
the pump. When checking for gas leaks by pressurization,
please pressurize by less than 0.05 MPa into the purge port and do
check.
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EBARA
Corporation