Troubleshooting (1) : Basic Trouble; Troubleshooting (2) : Alarm - EBARA EV-SA20 Instruction Manual

9.1 Troubleshooting (1) : Basic trouble

Abnormal symptom
Circuit Protector is activated.
Nothing appears on the
operation panel.
Pump does not start when
applying START button.
Pump does not start when
entering external "RUN" signal
input.
Pump starts suddenly.
Abnormal noise.
Excessive vibration
Vacuum pressure increase.
Rotation speed does not
increase.

9.2 Troubleshooting (2) : ALARM

Abnormal symptom
Display appears
lamp lights.
Display appears
lamp lights.
Display appears
lamp lights.
Display appears
lamp lights.
Display appears
lamp lights.
Display appears
lamp lights.
Display appears
lamp lights.
Display appears
lamp lights.
Display appears
lamp lights.
PM10U
Incorrect wiring.
Short circuit.
No power supply to pump.
CP is not ON.
No wiring of power supply.
Instrument failure.
"Remote" mode has been selected.
Start-up conditions are not satisfied.
Instrument failure.
"Local" mode has been selected.
Start-up conditions are not satisfied.
Instrument failure.
"RUN" signal was input before CP turns ON.
Adjustment feet are not applied.
Some object is making contact with the outer
cover.
The fastening screws of the outer cover have
worked themselves loose.
Parts of the pump are damaged.
Leak from vacuum piping.
Pump overload.
Frequency order failure.
Parts of the pump are damaged.
Supplied voltage failure.
Pump overload.
and ALM
Parts of the pump are damaged.
and ALM Supplied voltage is overflow.
Exhaust gas is back-streaming.
Supplied voltage is insufficient.
and ALM Incorrect wiring.
Momentary power failure occurs.
Instrument failure.
Supplied voltage is insufficient.
and ALM
Instrument failure.
Exhaust gas is running back.
and ALM
Parts of the pump are damaged.
Pump overload.
and ALM
Inverter overheat.
and ALM Pump overload.
Parts of the pump are damaged.
and ALM Pump overload.
Parts of the pump are damaged.
Pump overload.
Ambient temperature is high ( over 40 deg C).
and ALM
Ventilation of the pump is blocked.
Cooling fan stopped.
Check Item
Check Item
Corrective Action
Check wiring.
Replace or overhaul pump.
Check power supply.
Place CP to ON.
Connect power connector.
Replace instruments.
Set switch to "Local" mode.
Satisfy all start-up conditions.
Replace instruments.
Set switch to "Remote" mode.
Satisfy all start-up conditions.
Replace instruments.
Interrupt "RUN" signal before supplying power.
Use the adjustment feet.
Remove the object.
Tighten the fastening screws.
Replace or overhaul pump.
Check piping.
Check pressure and exhaust pipe.
Tune instruments up.
Replace or overhaul pump.
Check power supply.
Corrective Action
Check pressure and exhaust pipe.
Replace or overhaul pump.
Input regular voltage.
Prevent reflux.
Input regular voltage.
Check wiring.
Check power supply.
Replace instruments.
Input regular voltage.
Replace instruments.
Prevent reflux.
Replace or overhaul pump.
Check pump load.
Cool down inverter.
Check pump load.
Replace or overhaul pump.
Check pump load.
Replace or overhaul pump.
Check pump load.
Reduce the ambient temperature.
Open the space around the pump.
(see section 2.1.2)
Replace or overhaul pump.
EBARA
CORPORATION
P.55