Lcd Indication - EBARA ESA300W Instruction Manual

6.2 LCD Indication

The operating status of the pump is displayed on the LCD display of the controller.
For details of display, see Tables 6.1.
Table 6.1 LCD controller indication
No ITEM
Current
1
Control mode
2
Pump running mode
Alarm history
3
(Indication of history)
Pump unit No.
4
Pump model
5
Voltage
Total operation time
6
Back pressure (option)
7
Pump N2 gas flow
8
Cooling water flow
9
Motor speed
10
WARNING/ALARM
11
1. Three control modes are available : "LOCAL" (local operation) , "REMOTE"
(remote operation) and "COM" (Communication operation).
2. " % " shows present number of WARNING/ALARM.
3. Upper row "$$$$$$" distinguishes between WARNING/ALARM and
indicates the position where WARNING/ALARM has occurred.
Lower row "$$$$$$" displays details of WARNING/ALARM.
INDICATION
B P : # # . # #
M P : # # . # #
C O N T R O L :
M O D E : N O R M A L
A L A R M / W A R N I
H I S T O R Y ?
U N I T N O .
& & & & & & & &
P U M P. T Y P E
@ @ @ @ @ @
O P E . T I M E
# # # # #
B A C K P R E S S U R E
# # . #
P U M P N 2
# # . #
W A T E R F L O W
# # . #
B P S P E E D
# . # k
$ $ $ $ $ : $ $ $ $ $ $ $
$ $ $ $ $ $ $ $ $ $ $ $ $ $
(35)
A
A
L O C A L
N G
@ @ @ @
h
k P a
F L O W
3
P a m / s
L / m i n
m i n - 1
%
EBARA
CORPORATION