Lcd Indication - EBARA ESA500W Instruction Manual

P.26

6.2 LCD Indication

The operating status of the pump is displayed on the LCD display of the
controller. For details of display, see Table 6.1.
No
Current
1
Control mode
2
Pump running mode
Pump running history
3
Alarm history
4
(Indication of history)
Pump unit No.
5
Pump type
6
Voltage
Total operation time
7
Back pressure (option)
8
Pump N2 gas flow
9
Cooling water flow
10
Pump casing temperature
11
Exhaust pipe tempreature
Motor speed
12
WARNING/ALARM
13
PM10U
Table 6.1 LCD controller indication
ITEM
B P :
M P :
C O N T R O L :
M O D E :
P U M P
H I
A L A R M /
H I
U N I
& & & & & & & &
P U M P.
@ @ @ @ @ @
O P E .
B A C K
P U M P
W A T E R
B P :
E X H :
B P
$ $ $ $ $ :
$ $ $ $ $ $ $ $ $ $ $ $ $ $
INDICATION
# # . # A
# # . # A
L O C A L
N O R M A L
R U N N I
S T O R Y ?
W A R N I
S T O R Y ?
T N O
T Y P E
T I M E
# # # # #
P R E S S U R E
# # . # k P a
N 2 F L O W
# # . # P a m
F L O W
# # . # L /
# # #
℃
# # #
℃
S P E E D
# . # k m i
$ $ $ $ $ $ $
N G
N G
@ @ @ V
h
3
/ s
m i n
n - 1
%
EBARA
CORPORATION